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Title Flushing Type MAT403W
Product name Flushing Type MAT403W
Certificate
Model name Flushing Type MAT403W Company MAT
Telephone 82-31-659-0600 Homepage http://www.mat.co.kr
Email Application Part
Main image wet_img_01.jpg  Date 2018-12-28 AM 10:25:01
Contents

 



  • Wet type system

  • Inlet anti clogging System

  • Safety design with metal core frame and reinforced plastic

  • Dual path design with high efficiency for Wet Chamber

  • PLC control with Automatic system

  • Certified Semi S2 Mark

 

 

  • Power : A/C 200~240V, 3phase, 15Amp

  • N₂: 4~7kgf/cm²(20slm), 1/4″Tube(Optional)

  • City Water : 3~5kgf/cm²(3ℓ/min), 3/8″Tube

  • Gas Inlet : NW50 Flange 4ports

  • Drain : Acid Drain 1) Natural Drain : 40A PVC Pipe 2) Power Drain : 26mm PVC Pipe

  • Gas Exhaust : -50~-100mmH2O, 1m³/min, 76mm PVC Pipe

  • Cabinet Exhaust : -50mmH2O, 1m³/min, Φ100mm(Optional)

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